Title :
A micromachined interface for transfer of liquid or vapour sample to a liquid solution
Author :
Van Der Wijngaart, Wouter ; Frisk, Thomas ; Stemme, Goran
Author_Institution :
Dept. of S3, R. Inst. of Technol., Stockholm, Sweden
Abstract :
A novel microfluidic interface for vapour-to-liquid adsorption and droplet-to-liquid transfer was designed and fabricated using silicon micromachining. The interface was characterised and successfully tested.
Keywords :
chemical analysis; elemental semiconductors; microfluidics; micromachining; silicon; vapour deposition; droplet-to-liquid transfer; liquid interfacing; liquid solution; liquid transfer; microfluidic interface; silicon micromachining; vapour transfer; vapour-to-liquid adsorption; Chemical analysis; Connectors; Filling; Fluid flow; Geometry; Microfluidics; Robustness; Silicon; Steel; Surface resistance;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497312
