Title :
High Power Applications of RF-MEMS
Author :
Blondy, P. ; Palego, C. ; Pothier, A. ; Crunteanu, A. ; Gasseling, T. ; Champeaux, C. ; Catherinot, A. ; Tristant, P.
Author_Institution :
UMR CNRS, Univ. de Limoges
Abstract :
This paper presents recent results on the development of high power MEMS switched varactors. Design methodology as well as fabrication and measurement results are presented. The MEMS varactors are made of a thick metal gold cantilever, with a reduced contact area, that allows to control high power microwave signals. Operation up to 5 watts CW is demonstrated, with good reliability. First results on applications to phase shifters is presented
Keywords :
cantilevers; gold; microswitches; microwave switches; phase shifters; varactors; Au; Gold cantilever; MEMS switched varactors; RF-MEMS; microwave switches; phase shifters; Conductors; Energy consumption; Fabrication; Micromechanical devices; Microwave circuits; Phase shifters; Power system reliability; Radiofrequency microelectromechanical systems; Switches; Varactors; RF-MEMS; high power microwave signals; phase shifters; reliability;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2007 Topical Meeting on
Conference_Location :
Long Beach, CA
Print_ISBN :
0-7803-9764-9
Electronic_ISBN :
0-7803-9765-7
DOI :
10.1109/SMIC.2007.322785
