Title :
New developments in excimer laser micromachining by image projection
Author_Institution :
Exitech Ltd., Hanborough, UK
fDate :
2/27/1996 12:00:00 AM
Abstract :
This talk describes recent advances in the novel use of mask projection for micromachining by excimer laser photoablation
Keywords :
excimer lasers; laser ablation; laser beam machining; masks; micromachining; excimer laser micromachining; excimer laser photoablation; image projection; mask projection;
Conference_Titel :
Microengineering Applications in Optoelectronics, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19960236
