Title :
High-Q Tunable Silver Capacitors for RFIC´s
Author :
Rais-Zadeh, Mina ; Ayazi, Farrokh
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
This paper presents implementation and characterization of high quality factor (Q) silver (Ag) in-plane tunable capacitors on various substrates. A combination of low-loss substrate and the highest conductivity metal is used to achieve very high Q at RF frequencies. A high quality factor (Q>200 @1GHz) 0.7pF silver capacitor fabricated on a low-loss suspended Avatrel membrane achieved a tuning of 130%
Keywords :
Q-factor; capacitors; micromechanical devices; radiofrequency integrated circuits; silver; 0.7 pF; 1 GHz; Ag; Avatrel membrane; MEMS; in-plane tunable capacitors; quality factor; radiofrequency integrated circuits; Biomembranes; Circuit optimization; Fabrication; Frequency; MOS capacitors; Micromechanical devices; Q factor; Silver; Tunable circuits and devices; Tuning; Dual gap; Micromachining; Quality factor; Silver; Tunable capacitor;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2007 Topical Meeting on
Conference_Location :
Long Beach, CA
Print_ISBN :
0-7803-9764-9
Electronic_ISBN :
0-7803-9765-7
DOI :
10.1109/SMIC.2007.322786
