Title :
A New Test Method and System of Low-cost MEMS Gyroscope
Author :
Haipeng, Zhang ; Jingbo, Zhao ; Xianglong, Zhou ; Hailong, Jiang
Author_Institution :
Qingdao Navy Submarine Acad., Qingdao
Abstract :
The test precision of MEMS gyroscope parameters is depressed by the influence of its big input axis misalignment angle. We studied the influence to the test error of input axis misalignment angle itself and the scale factor. Then we proposed an uncouple principle, established a precise mathematic model, and designed a set of uncouple test equipment and experiment. The findings of half-physics simulation show that this method can realize uncoupling of scale factor and input axis misalignment and can make the test precision be free from the influence of the input axis misalignment value. This method can improve the test accurate and especially be suitable to the MEMS gyroscopes with big input axis misalignment angles.
Keywords :
gyroscopes; micromechanical devices; testing; MEMS gyroscope; half-physics simulation; input axis misalignment angle; scale factor; uncouple principle; uncouple test equipment; Angular velocity; Calibration; Electronic equipment testing; Extraterrestrial measurements; Gyroscopes; Instruments; Micromechanical devices; System testing; Test equipment; Voltage; MEMS gyroscope; calibration; input axis misalignment; scale factor; uncoupling;
Conference_Titel :
Electronic Measurement and Instruments, 2007. ICEMI '07. 8th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4244-1136-8
Electronic_ISBN :
978-1-4244-1136-8
DOI :
10.1109/ICEMI.2007.4351144
