Title :
Improving the performance of spatial light modulators using custom microfabrication techniques
Author :
Hara, A.O. ; Underwood, I. ; Vass, D.G. ; Begbie, M. ; Bennett, D.J. ; Stevenson, J.T.M. ; Gundlach, A.M.
Author_Institution :
Dept. of Phys., Edinburgh Univ., UK
Abstract :
We have pioneered the development of a generic spatial light modulator (SLM) technology which utilises a ferroelectric liquid crystal (FLC) layer in direct contact with a VLSI silicon backplane. The silicon backplane is invariably based on a random access memory (RAM) device and we have produced arrays up to 256×256 pixels, with larger and faster arrays already under development. The silicon backplanes are fabricated at one of a number of silicon foundries.
Keywords :
VLSI; ferroelectric liquid crystals; integrated optoelectronics; liquid crystal devices; optical fabrication; optical storage; random-access storage; spatial light modulators; Si; VLSI silicon backplane; custom microfabrication techniques; ferroelectric liquid crystal layer; generic spatial light modulator; random access memory; silicon backplane fabrication; silicon foundries; spatial light modulators;
Conference_Titel :
Microengineering Applications in Optoelectronics, IEE Colloquium on
Conference_Location :
London, UK
DOI :
10.1049/ic:19960237
