Electron interactions with C/sub 2/F/sub 6/

Summary form only given, as follows. Perfluoroethane (C/sub 2/F/sub 6/) is a man-made gas with many important applications in the semiconductor industry, in plasma chemistry and etching technologies, and in pulsed power switching. Knowledge of the interactions of slow electrons (/spl les/100 eV) is fundamental in optimizing the parameters involved in particular applications and in modeling industrial processes. We, therefore, have critically assessed and synthesized existing knowledge on electron interactions with C/sub 2/F/sub 6/. With the exception of electron attachment and electron impact ionization, the existing data on most of the fundamental electron-C/sub 2/F/sub 6/ interaction processes are limited. Nontheless, the present synthesis has led to a reasonable body of results which will be presented and discussed. These include (I) cross sections for total electron scattering, total and partial ionization, momentum transfer, integral elastic, vibrational inelastic, total dissociation, and electron attachment; and (ii) coefficients for electron attachment, ionization, effective ionization, and electron transport (drift velocity and lateral electron diffusion). Cross sections for electron scattering, momentum transfer, and dissociation of C/sub 2/F/sub 6/ into neutral fragments are especially needed.