Title :
SnO2 submicron wires for gas sensors
Author :
Comini, E. ; Faglia, G. ; Sberveglieri, G. ; Candeloro, P. ; Carpentiero, A. ; Fabrizio, E. Di
Author_Institution :
SENSOR Lab, Brescia Univ., Owensboro, KY, USA
Abstract :
In this work lithographic techniques, combined with sputtering depositions, are employed to fabricate semiconductor metal-oxide (MOX) gas sensors with controlled grain dimensions. The basic idea is to replace the continuous sensing film of standard MOX sensors with a pattern of wires in the submicron scale, thus providing a maximum lateral size for the grains. The electrical responses to several gases are tested and compared with the responses of continuous film sensors. The experimental data highlight an improvement for the patterned sensors.
Keywords :
gas sensors; lithography; microsensors; semiconductor-insulator boundaries; sputter deposition; tin compounds; SnO2; continuous film sensors; electrical responses; gas sensors; grain dimensions control; lithographic techniques; semiconductor metal-oxides; sputtering deposition; submicron wires; Electron beams; Gas detectors; Lithography; Nickel; Plasma temperature; Resists; Sensor phenomena and characterization; Sputtering; Substrates; Wires;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497341
