Selective local synthesis of nanowires on a microreactor chip

This work presents a novel synthesis process for selectively locally growing nanowires on a microreactor chip fabricating by MEMS process. Carbon nanotubes (CNT) are synthesized using a chemical vapor deposition (CVD) technique by controlling the temperature of the microheaters in the microchamber of the device. The diameter of the synthesized CNT is about 15 nm, and the length is about 100-200 nm. The design and modeling of the microheater/reactor chip is discussed. The fabrication process and the packaging of the device, which include catalyst patterning with the fabrication of microheater and anodic bonding process, are presented. Finally, the process parameters, such as the heating voltages, synthesis times and the flow-rates of chemicals, are discussed.