DocumentCode

1736412

Title

A Silicon Microvalve With Integrated Flow Sensor

Author

Franz, Jochen ; Baumann, Hdlmut ; Trah, Hans-Peter

Volume

2

fYear

1995

Firstpage

313

Lastpage

316

Keywords

Actuators; Biomembranes; Fabrication; Heating; Microvalves; Resistors; Silicon; Temperature sensors; Thermal sensors; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721809

Filename

721809