A novel particle assembly template using plasma surface modification and self-assembly monolayer for nano/micro patterns

Author

Su, Wang-Shen ; Fang, Weileun ; Tsai, Ming-Shih

Author_Institution

MEMS Inst., Nat. Tsing-Hua Univ., Hsinchu, Taiwan

Volume

2

fYear

2005

Firstpage

1453

Abstract

A novel self-assembly method of particles on the specific hydrophilic pattern regions to fabricate nano/micro patterns has been investigated in this study. The surface hydrophilicity modification is employed to tune the contact angle of droplet. Control of surface energy was investigated in this study for finely tuning the shape and layer number of particles assembly. The micro/nano patterns formed by commercial polystyrene (PS) and colloidal silica aqueous suspension (Bayer-50CK) particles on silicon substrates after O₂ and H₂ plasma treatments were demonstrated.

Keywords

colloids; drops; hydrogen neutral molecules; micromechanical devices; monolayers; nanoparticles; nanopatterning; oxygen; plasma deposition; self-assembly; silicon; substrates; Bayer-50CK; H₂; O₂; Si; colloidal silica aqueous suspension; droplet contact angle; hydrophilic pattern region; micropattern; nanopattern; particle assembly template; pattern fabrication; plasma surface modification; plasma treatment; polystyrene; self-assembly monolayer; silicon substrate; surface energy; surface hydrophilicity modification; Assembly; Hydrogen; Plasma chemistry; Resists; Rough surfaces; Self-assembly; Silicon; Surface morphology; Surface roughness; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497356

Filename

1497356