Title :
Nano-net fabrication on the glass capillary by focused-ion-beam chemical-vapor-deposition
Author :
Kometani, Reo ; Hoshino, Takayuki ; Kanda, Kazuhiro ; Haruyama, Yuichi ; Kaito, Takashi ; Fujita, Jun-ichi ; Ishida, Masahiko ; Ochiai, Yukinori ; Matsui, Soya
Author_Institution :
Hyogo Univ., Japan
Abstract :
Nano-tools are very important for the subcellular operation and analysis in the bio-experiments. For giving the high-performance to nano-tool, we think that it is necessary to make tools the three-dimensional (3D) nano-structure devices. Therefore, we have performed the 3D nano-tools fabrication by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). This time, a nano-net as a novel 3D nano-tool was fabricated by using FIB-CVD. And we succeeded in scooping the polystyrene micro-sphere with a diameter of 2.0 μm by using a nano-net.
Keywords :
chemical vapour deposition; focused ion beam technology; nanotechnology; 2 micron; 3D nanostructure device; 3D nanotools; bio-experiment; focused-ion-beam chemical-vapor-deposition; glass capillary; nanonet fabrication; polystyrene microsphere; subcellular operation; Biochemical analysis; Biosensors; Chemical analysis; Chemical vapor deposition; Fabrication; Focusing; Glass; Nanoscale devices; Nanotechnology; National electric code;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497367
