Nano-net fabrication on the glass capillary by focused-ion-beam chemical-vapor-deposition

Author

Kometani, Reo ; Hoshino, Takayuki ; Kanda, Kazuhiro ; Haruyama, Yuichi ; Kaito, Takashi ; Fujita, Jun-ichi ; Ishida, Masahiko ; Ochiai, Yukinori ; Matsui, Soya

Author_Institution

Hyogo Univ., Japan

Volume

2

fYear

2005

Firstpage

1497

Abstract

Nano-tools are very important for the subcellular operation and analysis in the bio-experiments. For giving the high-performance to nano-tool, we think that it is necessary to make tools the three-dimensional (3D) nano-structure devices. Therefore, we have performed the 3D nano-tools fabrication by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). This time, a nano-net as a novel 3D nano-tool was fabricated by using FIB-CVD. And we succeeded in scooping the polystyrene micro-sphere with a diameter of 2.0 μm by using a nano-net.

Keywords

chemical vapour deposition; focused ion beam technology; nanotechnology; 2 micron; 3D nanostructure device; 3D nanotools; bio-experiment; focused-ion-beam chemical-vapor-deposition; glass capillary; nanonet fabrication; polystyrene microsphere; subcellular operation; Biochemical analysis; Biosensors; Chemical analysis; Chemical vapor deposition; Fabrication; Focusing; Glass; Nanoscale devices; Nanotechnology; National electric code;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497367

Filename

1497367