• DocumentCode
    1737196
  • Title

    Application of porous silicon technology to optical waveguiding

  • Author

    Loni, A. ; Bozeat, R.J. ; Krueger, M. ; Berger, M.G. ; Arens-Fischer, R. ; Thoenissen, M. ; Arrand, H.F. ; Benson, T.M.

  • Author_Institution
    Defence Res. Agency, Malvern, UK
  • fYear
    1996
  • fDate
    2/27/1996 12:00:00 AM
  • Firstpage
    42583
  • Lastpage
    42587
  • Abstract
    Porous silicon is a widely studied material which has significant potential for the realisation of monolithic, all-silicon optoelectronic integrated circuits. To maintain monolithicity, irrespective of the light source technology used, silicon-based optical waveguides will be required, these enabling light from the source to be routed and split to different points, on-chip or otherwise. Although a number of silicon-based waveguide technologies are available, the aim of the present study is to highlight the use of, and flexibility afforded by, porous silicon as a waveguide medium
  • Keywords
    VLSI; integrated optics; integrated optoelectronics; optical fabrication; optical waveguides; porous materials; silicon; Si; light source technology; monolithic all-silicon optoelectronic integrated circuits; monolithicity; on-chip; optical waveguiding; porous silicon; porous silicon technology; silicon-based optical waveguides; silicon-based waveguide technologies; waveguide medium;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Microengineering Applications in Optoelectronics, IEE Colloquium on
  • Conference_Location
    London
  • Type

    conf

  • DOI
    10.1049/ic:19960243
  • Filename
    542842