DocumentCode
1737196
Title
Application of porous silicon technology to optical waveguiding
Author
Loni, A. ; Bozeat, R.J. ; Krueger, M. ; Berger, M.G. ; Arens-Fischer, R. ; Thoenissen, M. ; Arrand, H.F. ; Benson, T.M.
Author_Institution
Defence Res. Agency, Malvern, UK
fYear
1996
fDate
2/27/1996 12:00:00 AM
Firstpage
42583
Lastpage
42587
Abstract
Porous silicon is a widely studied material which has significant potential for the realisation of monolithic, all-silicon optoelectronic integrated circuits. To maintain monolithicity, irrespective of the light source technology used, silicon-based optical waveguides will be required, these enabling light from the source to be routed and split to different points, on-chip or otherwise. Although a number of silicon-based waveguide technologies are available, the aim of the present study is to highlight the use of, and flexibility afforded by, porous silicon as a waveguide medium
Keywords
VLSI; integrated optics; integrated optoelectronics; optical fabrication; optical waveguides; porous materials; silicon; Si; light source technology; monolithic all-silicon optoelectronic integrated circuits; monolithicity; on-chip; optical waveguiding; porous silicon; porous silicon technology; silicon-based optical waveguides; silicon-based waveguide technologies; waveguide medium;
fLanguage
English
Publisher
iet
Conference_Titel
Microengineering Applications in Optoelectronics, IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19960243
Filename
542842
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