Title :
Fiber-optic based scanning confocal microscopic interferometer for the measurement of surface topography in manufacturing process
Author :
Zhihua Ding ; Guanming Lai
Author_Institution :
Dept. of Electr. & Electron. Eng., Shizuoka Univ.
Abstract :
A fiber-optic based scanning confocal microscopic interferometer in which digital feedback is used for precisely measuring the surface topography on a large-scale object of complex shape with steep surface slopes is developed. Analysis on interference formation is performed, showing the confocal characteristics of the proposed interferometer along its measurement path. The spatial resolution of the system is confirmed to be within 1 micrometer, and the measurement accuracy is better than 5 nanometers
Keywords :
interferometry; manufacturing processes; optical microscopy; surface topography measurement; digital feedback; fiber-optic based scanning confocal microscopic interferometer; large-scale complex shape object; manufacturing process; measurement accuracy; spatial resolution; surface topography measurement; Interference; Large-scale systems; Lenses; Optical fibers; Optical filters; Optical interferometry; Optical microscopy; Shape measurement; Spatial resolution; Surface topography;
Conference_Titel :
Industry Applications Conference, 2000. Conference Record of the 2000 IEEE
Conference_Location :
Rome
Print_ISBN :
0-7803-6401-5
DOI :
10.1109/IAS.2000.881958
