Fiber-optic based scanning confocal microscopic interferometer for the measurement of surface topography in manufacturing process

Author

Zhihua Ding ; Guanming Lai

Author_Institution

Dept. of Electr. & Electron. Eng., Shizuoka Univ.

Volume

2

fYear

2000

fDate

2000

Firstpage

1029

Abstract

A fiber-optic based scanning confocal microscopic interferometer in which digital feedback is used for precisely measuring the surface topography on a large-scale object of complex shape with steep surface slopes is developed. Analysis on interference formation is performed, showing the confocal characteristics of the proposed interferometer along its measurement path. The spatial resolution of the system is confirmed to be within 1 micrometer, and the measurement accuracy is better than 5 nanometers

Keywords

interferometry; manufacturing processes; optical microscopy; surface topography measurement; digital feedback; fiber-optic based scanning confocal microscopic interferometer; large-scale complex shape object; manufacturing process; measurement accuracy; spatial resolution; surface topography measurement; Interference; Large-scale systems; Lenses; Optical fibers; Optical filters; Optical interferometry; Optical microscopy; Shape measurement; Spatial resolution; Surface topography;

fLanguage

English

Publisher

ieee

Conference_Titel

Industry Applications Conference, 2000. Conference Record of the 2000 IEEE

Conference_Location

Rome

ISSN

0197-2618

Print_ISBN

0-7803-6401-5

Type

conf

DOI

10.1109/IAS.2000.881958

Filename

881958