• DocumentCode
    1737774
  • Title

    Timed Petri net models of cluster tools

  • Author

    Zuberek, W.M.

  • Author_Institution
    Dept. of Comput. Sci., Memorial Univ. of Newfoundland, St. John´´s, Nfld., Canada
  • Volume
    4
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    3063
  • Abstract
    Timed Petri nets are used as models of cluster tools, representing not only the concurrent activities of different chambers, but also the durations of these activities. Structural analysis, based on net invariants, provides basic performance measures, such as throughput and cycle time. The results are obtained in symbolic form, so many specific alternatives can easily be compared without repeated analyses of the models
  • Keywords
    Petri nets; cluster tools; integrated circuit manufacture; production control; cluster tools; cycle time; integrated environmentally isolated manufacturing system; net invariants; structural analysis; throughput; timed Petri net models; Computer science; Orbital robotics; Performance analysis; Petri nets; Robot kinematics; Semiconductor device modeling; Space technology; Steady-state; Throughput; Transient analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Systems, Man, and Cybernetics, 2000 IEEE International Conference on
  • Conference_Location
    Nashville, TN
  • ISSN
    1062-922X
  • Print_ISBN
    0-7803-6583-6
  • Type

    conf

  • DOI
    10.1109/ICSMC.2000.884468
  • Filename
    884468
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1737774