Accurate multiplexed test structure for threshold voltage matching evaluation

Author

Welter, Loic ; Dreux, Philippe ; Innocenti, Jordan ; Aziza, H. ; Portal, J.-M.

Author_Institution

STMicroelectron. Rousset, Rousset, France

fYear

2014

fDate

6-8 May 2014

Firstpage

1

Lastpage

6

Abstract

This paper presents a multiplexed test structure able to measure a large number of transistor threshold voltages within a scribe line. To achieve this, switches are used to select a single transistor among others in a small multiplexed array. A study to evaluate the influence of this multiplexing system on electrical measurement is conducted. Post-layout simulations are presented to validate the concept for transistor matching characterization.

Keywords

MOSFET; multiplexing; semiconductor device testing; semiconductor switches; MOS transistors; accurate multiplexed test structure; electrical measurement; metal oxide semiconductor transistors; post-layout simulations; scribe line; small multiplexed array; switches; threshold voltage matching evaluation; transistor matching characterization; transistor threshold voltages; Arrays; Current measurement; Electrical resistance measurement; Logic gates; MOSFET; multiplexed test structure; threshold voltage; transistor matching;

fLanguage

English

Publisher

ieee

Conference_Titel

Design & Technology of Integrated Systems In Nanoscale Era (DTIS), 2014 9th IEEE International Conference On

Conference_Location

Santorini

Type

conf

DOI

10.1109/DTIS.2014.6850657

Filename

6850657