• DocumentCode
    1739191
  • Title

    Effect of substrate origin on stability of electrical conductivity of SnO2 thin polycrystalline films

  • Author

    Ivashchenko, Anatolii ; Kerner, Iacov ; Maronchuk, Irina

  • Author_Institution
    Inst. of Appl. Phys., Acad. of Sci. of Moldova, Chisinau, Moldova
  • Volume
    1
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    139
  • Abstract
    The variation of electrical conductivity induced by annealing in SnO2 thin films deposited on three types of substrate is considered. The effect of substrate origin on the stability of electrical conductivity is discussed
  • Keywords
    annealing; electrical conductivity; semiconductor materials; semiconductor thin films; stability; substrates; tin compounds; SnO2; SnO2 thin polycrystalline films; annealing; chemical sensors; electrical conductivity stability; gas sensors; substrate origin; Annealing; Conductive films; Conductivity; Crystallization; Optical films; Optical scattering; Semiconductor films; Stability; Substrates; Temperature dependence;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2000. CAS 2000 Proceedings. International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-5885-6
  • Type

    conf

  • DOI
    10.1109/SMICND.2000.890205
  • Filename
    890205
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1739191