Title :
Effect of substrate origin on stability of electrical conductivity of SnO2 thin polycrystalline films
Author :
Ivashchenko, Anatolii ; Kerner, Iacov ; Maronchuk, Irina
Author_Institution :
Inst. of Appl. Phys., Acad. of Sci. of Moldova, Chisinau, Moldova
Abstract :
The variation of electrical conductivity induced by annealing in SnO2 thin films deposited on three types of substrate is considered. The effect of substrate origin on the stability of electrical conductivity is discussed
Keywords :
annealing; electrical conductivity; semiconductor materials; semiconductor thin films; stability; substrates; tin compounds; SnO2; SnO2 thin polycrystalline films; annealing; chemical sensors; electrical conductivity stability; gas sensors; substrate origin; Annealing; Conductive films; Conductivity; Crystallization; Optical films; Optical scattering; Semiconductor films; Stability; Substrates; Temperature dependence;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.890205
