• DocumentCode
    1739206
  • Title

    Tunable microwave SER on silicon membrane

  • Author

    Sajin, George ; Matei, Elena ; Marcelli, Romolo

  • Author_Institution
    Nat. Res. & Dev. Inst. for Microtechnol., Romania
  • Volume
    1
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    241
  • Abstract
    This work presents performances of a tunable microwave straight edge resonator (SER) on a silicon membrane. The aim of this approach is to obtain a miniaturised MSW device, integrable in a planar microwave circuit. S11 and S21 parameters of this device are presented for various magnetic polarizing fields showing frequency tunability between approximately 4.2 GHz and 7.25 GHz. Using silicon membranes to support these devices offers important openings toward SER integration in MMIC
  • Keywords
    MMIC; magnetic microwave devices; magnetostatic wave devices; membranes; resonators; silicon; tuning; 4.2 to 7.25 GHz; MMIC; SHF; Si membrane; frequency tunability; integrable device; magnetic polarizing fields; miniaturised MSW device; planar microwave circuit; straight edge resonator; tunable microwave resonator; Biomembranes; Etching; Frequency; Magnetostatic waves; Microwave devices; Optical ring resonators; Q factor; Silicon; Transducers; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2000. CAS 2000 Proceedings. International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-5885-6
  • Type

    conf

  • DOI
    10.1109/SMICND.2000.890227
  • Filename
    890227
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1739206