A novel structure of micromachined optical switch with self-aligned holding structures of optical fibers

Micromachined optical switches are one of the main elements of optical crossconnects, and are as such one of the essential devices in optical transmission networks. In this paper, the free-space micromachined optical switch with holding structures of fibers, which are formed during the same etch steps of switch structures, is demonstrated. It has been fabricated by a mixture of both surface micromachining and bulk silicon micromachining processes. It features self-alignment of optical fibers and the holding structures of fibers and switch are integrated on a chip