Title :
Flexible semiconductor films for sensitive skin
Author :
Sinius, J. ; Gaska, R. ; Shur, M.S.
Author_Institution :
Dept. of Electr. Comput. & Syst. Eng., Rensselaer Polytech. Inst., Troy, NY, USA
Abstract :
Recently, the artificial “sensitive skin” concept, which incorporates intelligent, flexible large area sensor arrays along with software and data processing capabilities, has been proposed. In this paper, we report on fabrication, characterization and properties of polycrystalline semiconductor and metal films and thin-film structures chemically deposited on large area flexible substrates at low temperatures (close to room temperature). This technology will find applications for the development of the “sensitive skin”. Examples are discussed using CdSe and CuxS films
Keywords :
II-VI semiconductors; array signal processing; cadmium compounds; copper compounds; intelligent sensors; liquid phase deposited coatings; semiconductor thin films; CdSe; CuxS films; CuS; chemically deposited thin-film structures; data processing capabilities; flexible semiconductor films; intelligent flexible large-area sensor arrays; large-area flexible substrates; metal film; polycrystalline semiconductor film; sensitive skin characterization; sensitive skin fabrication; sensitive skin properties; Artificial intelligence; Chemical sensors; Data processing; Fabrication; Intelligent sensors; Semiconductor films; Sensor arrays; Sensor phenomena and characterization; Skin; Temperature sensors;
Conference_Titel :
Intelligent Robots and Systems, 2000. (IROS 2000). Proceedings. 2000 IEEE/RSJ International Conference on
Conference_Location :
Takamatsu
Print_ISBN :
0-7803-6348-5
DOI :
10.1109/IROS.2000.893234
