Title :
A board-level electro-microfluidic systems fabrication process based on electronic design methodology
Author :
Martel, Sylvain ; Au, Joanna ; Hunter, Ian
Author_Institution :
BioInstrum. Lab., MIT, Cambridge, MA, USA
Abstract :
Microfluidic/nanofluidic systems are a promising technology that will prove to be an essential tool in several research areas including but not limited to biotechnology. As microfluidic systems become more complex, the need for a more efficient design and implementation methodology becomes apparent. As such, this paper describes methodology that adapts Electronic Design Automation (EDA) tools to Fluidic Design Automation (FDA) that can be used to design and fabricate board-level electro-microfluidic and electro-nanofluidic systems comprised of a mix of fluidic and electronic layers
Keywords :
biotechnology; electronic design automation; microfluidics; board-level electro-microfluidic systems fabrication process; electronic design methodology; fluidic design automation; implementation methodology; mixed fluidic/electronic layers; nanofluidic systems; research areas; Design automation; Design methodology; Electronic design automation and methodology; Fabrication; Laboratories; Lithography; Microfluidics; Micromachining; Resists; Silicon;
Conference_Titel :
Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000
Conference_Location :
Lyon
Print_ISBN :
0-7803-6603-4
DOI :
10.1109/MMB.2000.893795