Title :
Direct nanoprinting technology and its application to nanostructure fabrication
Author :
Yokoo, A. ; Nakao, M. ; Masuda, H. ; Tamamura, T.
Author_Institution :
NTT Basic Res. Labs., Tokyo, Japan
Abstract :
We have described direct nanoprinting technology and its application in the fabrication of an aluminum nanohole array and recording media. Using the replication technique presented here, it will be possible to fabricate nanostructures efficiently and economically in the future
Keywords :
aluminium; electron beam lithography; etching; nanotechnology; optical disc storage; optical fabrication; Al; aluminum nanohole array fabrication; direct nanoprinting technology; nanostructure fabrication; recording media; replication technique; Aluminum; Artificial intelligence; Fabrication; Glass; Image storage; Lithography; Oxidation; Printing; Silicon carbide;
Conference_Titel :
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location :
Rio Grande
Print_ISBN :
0-7803-5947-X
DOI :
10.1109/LEOS.2000.893890
