Title :
Micromachined picosecond optical near-field probe for pulse-coupling measurement of interconnection lines
Author :
Lee, Jongjoo ; Lee, Heeseok ; Baek, Seungyong ; Yuchul Jung ; Kim, Joungho
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
Abstract :
We have successfully developed a novel picosecond optical near-field probe for the high-frequency field mapping of interconnection lines. The transverse tangential electric field distribution of the microstrip coupled transmission lines was obtained
Keywords :
coupled transmission lines; electric fields; integrated circuit interconnections; integrated circuit measurement; integrated circuit metallisation; integrated circuit packaging; micro-optics; micromachining; microsensors; microstrip lines; microwave integrated circuits; probes; high-frequency field mapping; interconnection lines; micromachined optical near-field probe; microstrip coupled transmission lines; optical near-field probe; pulse-coupling measurement; transverse tangential electric field distribution; High speed optical techniques; Integrated circuit interconnections; Optical films; Optical interconnections; Optical pulse generation; Optical pulses; Optical switches; Probes; Pulse measurements; Spatial resolution;
Conference_Titel :
Electrical Performance of Electronic Packaging, 2000, IEEE Conference on.
Conference_Location :
Scottsdale, AZ
Print_ISBN :
0-7803-6450-3
DOI :
10.1109/EPEP.2000.895524
