DocumentCode
1741782
Title
Optical microstructures formed by self-assembly during MBE re-growth of GaAs on pre-patterned substrates
Author
Oulton, R.F. ; Stavrinou, P.N. ; Willams, R. ; Ashwin, M. ; McCarthy, O. ; Tucker, J. ; Roberts, C. ; Jones, T.S. ; Parry, G.
Author_Institution
Centre for Electron. Mater. & Devices, Imperial Coll. of Sci., Technol. & Med., London, UK
fYear
2000
fDate
12-12 May 2000
Firstpage
55
Lastpage
56
Abstract
Summary form only given. There is considerable interest in the study of light emission from optical cavities whose dimensions are of the order of a wavelength in all three dimensions. Most work has been carried out on etched structures. We propose and demonstrate a novel method for the fabrication of GaAs semiconductor optical microstructures by self-organization during molecular beam epitaxial growth (MBE) on pre-patterned micron scale mesa structures. The structures formed during this process are pyramidal and the faces of the pyramid are the stable facets formed during the MBE re-growth process. Such a structure, coupled with a planar Bragg reflector, may provide a novel means of achieving three-dimensional confinement of optical modes. We also present calculations of the optical modes, which can be supported within metal clad pyramidal structures and consider the significance of the results for the design and fabrication of microcavities.
Keywords
III-V semiconductors; cavity resonators; gallium arsenide; micro-optics; molecular beam epitaxial growth; optical design techniques; optical fabrication; optical planar waveguides; optical resonators; self-assembly; semiconductor epitaxial layers; substrates; GaAs; GaAs semiconductor optical microstructures; MBE re-growth; MBE re-growth process; design; etched structures; fabrication; light emission; metal clad pyramidal structures; microcavities; molecular beam epitaxial growth; optical cavities; optical microstructures; optical mode; optical modes; planar Bragg reflector; pre-patterned substrates; pyramid; pyramidal structures; re-patterned micron scale mesa structures; self-assembly; self-organization; stable facets; three-dimensional confinement; wavelength; Etching; Gallium arsenide; Microstructure; Molecular beam epitaxial growth; Optical coupling; Optical design; Optical device fabrication; Self-assembly; Stimulated emission; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2000. (QELS 2000). Technical Digest
Conference_Location
San Francisco, CA, USA
ISSN
1094-5695
Print_ISBN
1-55752-608-7
Type
conf
Filename
901609
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