Micromachined tunable three-dimensional solid Fabry-Perot etalons

Author

Lin, L.Y. ; Shen, J.L. ; Lee, S.S. ; Wu, C. ; Sergent, M.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

1996

fDate

25 Feb.-1 March 1996

Firstpage

55

Lastpage

56

Abstract

Summary form only given. In summary, we have demonstrated three-dimensional tunable solid Fabry-Ferot etalons fabricated integrally with rotational stages using the surface micromachining technique. A tuning range of 58.5 nm has been achieved by rotating the on chip rotational stage. The three-dimensional Fabry Perot etalons can be integrated with other free-space microoptical elements fabricated by similar techniques.

Keywords

Fabry-Perot interferometers; Fabry-Perot resonators; integrated optics; micromachining; micromechanical resonators; optical communication equipment; optical fabrication; packaging; tuning; wavelength division multiplexing; 1.3 mum; free-space microoptical elements; micromachined tunable three-dimensional solid Fabry-Perot etalons; on chip rotational stage; packaging; rotational stages; surface micromachining technique; three-dimensional tunable solid Fabry-Ferot etalons; tuning range; Fabry-Perot; Micromachining; Optical filters; Optical scattering; Optical sensors; Optical surface waves; Optical tuning; Solids; Space technology; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communications, 1996. OFC '96

Print_ISBN

1-55752-422-X

Type

conf

DOI

10.1109/OFC.1996.907637

Filename

907637