Robust synchronizing motion control of twin-servo systems based on network modeling

In this paper, a robust control method for synchronizing motions of a twin-servo system is proposed. Using the correspondence between the mathematical modeling and the circuit representation, a network representation of twin-servo system is proposed. And a stabilizing control input is designed based on robust internal-loop compensator for the separate system in the presence of uncertainty and disturbance. Skew motion compensating control input is also designed to maintain the synchronizing motion during high speed motion. The stability of the whole closed-loop system is proved based on passivity theory. Through experiments using a semiconductor chip mounting device, the performance of the proposed method is evaluated