Getters: micromolecular scavengers for packaging [MEMS]

Author

Previti, Mike ; Gilleo, Ken

Author_Institution

Cookson Semicond. Packaging Mater., USA

fYear

2001

fDate

2001

Firstpage

201

Lastpage

206

Abstract

MEMS has become a very high profile technology during the past year, but there are a host of issues that require economical technical solutions. Getters will play a key role in MEMS and MOEMS packaging. Dual-purpose moisture-particle getters appear ideal and are already used in some optical MEMS commercial products. More work must be done in this area, especially for quasi-hermetic packaging. A getter may enable lower cost packaging such as adhesive sealing or even plastic packaging

Keywords

adhesives; getters; micro-optics; micromechanical devices; moisture; seals (stoppers); semiconductor device packaging; surface contamination; MEMS; MEMS packaging; MEMS technology; MOEMS packaging; adhesive sealing; dual-purpose moisture-particle getters; getters; micromolecular scavengers; optical MEMS commercial products; packaging; packaging cost; plastic packaging; quasi-hermetic packaging; Electron tubes; Electronics packaging; Gettering; Glass; Micromirrors; Optical attenuators; Optical switches; Photonics; Semiconductor device packaging; Telecommunications;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Packaging Materials: Processes, Properties and Interfaces, 2001. Proceedings. International Symposium on

Conference_Location

Braselton, GA

Print_ISBN

0-930815-64-5

Type

conf

DOI

10.1109/ISAOM.2001.916575

Filename

916575