Title :
Getters: micromolecular scavengers for packaging [MEMS]
Author :
Previti, Mike ; Gilleo, Ken
Author_Institution :
Cookson Semicond. Packaging Mater., USA
Abstract :
MEMS has become a very high profile technology during the past year, but there are a host of issues that require economical technical solutions. Getters will play a key role in MEMS and MOEMS packaging. Dual-purpose moisture-particle getters appear ideal and are already used in some optical MEMS commercial products. More work must be done in this area, especially for quasi-hermetic packaging. A getter may enable lower cost packaging such as adhesive sealing or even plastic packaging
Keywords :
adhesives; getters; micro-optics; micromechanical devices; moisture; seals (stoppers); semiconductor device packaging; surface contamination; MEMS; MEMS packaging; MEMS technology; MOEMS packaging; adhesive sealing; dual-purpose moisture-particle getters; getters; micromolecular scavengers; optical MEMS commercial products; packaging; packaging cost; plastic packaging; quasi-hermetic packaging; Electron tubes; Electronics packaging; Gettering; Glass; Micromirrors; Optical attenuators; Optical switches; Photonics; Semiconductor device packaging; Telecommunications;
Conference_Titel :
Advanced Packaging Materials: Processes, Properties and Interfaces, 2001. Proceedings. International Symposium on
Conference_Location :
Braselton, GA
Print_ISBN :
0-930815-64-5
DOI :
10.1109/ISAOM.2001.916575
