Signal conditioning for Fabry-Perot sensor

Author

Ahmadi, Shahrokh ; Zaghloul, Mona

Author_Institution

Dept. of Electr. & Comput. Eng., George Washington Univ., Washington, DC, USA

Volume

2

fYear

2001

fDate

6-9 May 2001

Firstpage

277

Abstract

In this paper, a Fabry-Perot based spectrometer and some of its advantages and applications are discussed. The CMOS fabrication processing steps for a MEMS design of a Fabry-Perot and a companion photodiode are shown. This companion photodiode of Fabry-Perot converts the filtered light intensity into an electrical signal. A CMOS integrated circuit is designed for the signal conditioning and processing of photodiode electrical signal. Using the CMOS integrated circuit, the analog signal is converted into a digital form and is available in an 8-bit bus for further processing

Keywords

CMOS integrated circuits; analogue-digital conversion; interference spectrometers; microsensors; photodiodes; 8 bit; A/D conversion; CMOS fabrication processing steps; Fabry-Perot based spectrometer; Fabry-Perot sensor; MEMS design; companion photodiode; filtered light intensity; signal conditioning; CMOS technology; Fabrication; Fabry-Perot; Micromechanical devices; Optical filters; Optical sensors; Photodiodes; Semiconductor diodes; Signal processing; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2001. ISCAS 2001. The 2001 IEEE International Symposium on

Conference_Location

Sydney, NSW

Print_ISBN

0-7803-6685-9

Type

conf

DOI

10.1109/ISCAS.2001.921061

Filename

921061