Accurate extraction of the temperature of the heating element in micromachined gas sensors

Author

Baroncini, M. ; Placidi, P. ; Scorzoni, A. ; Cardinali, G.C. ; Dori, L. ; Nicoletti, S.

Author_Institution

Perugia Univ., Italy

Volume

3

fYear

2001

fDate

6-9 May 2001

Firstpage

445

Abstract

The sensitivity and selectivity of micromachined gas sensors strongly depend on the temperature of the heating element; therefore an accurate determination of this temperature is required. In this paper, a simple analytical model of the thermal behavior of a heating element placed onto a thermally insulated dielectric membrane is presented. It is demonstrated that simple resistance vs. power measurements are sufficient for a precise determination of the sensor temperature. These measurements performed “once and for all” at the wafer-level on the statistically relevant number of heaters, allowed us to determine a “universal” temperature vs. power curve

Keywords

gas sensors; microsensors; probes; analytical model; heating element; micromachined gas sensors; selectivity; sensitivity; temperature extraction; thermal behavior; thermally insulated dielectric membrane; universal temperature vs. power curve; Analytical models; Biomembranes; Dielectric measurements; Dielectrics and electrical insulation; Electrical resistance measurement; Gas detectors; Heating; Power measurement; Temperature dependence; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2001. ISCAS 2001. The 2001 IEEE International Symposium on

Conference_Location

Sydney, NSW

Print_ISBN

0-7803-6685-9

Type

conf

DOI

10.1109/ISCAS.2001.921343

Filename

921343