Title :
SSBW to PSAW conversion in SAW devices using heavy mechanical loading
Author :
Fusero, Y. ; Ballandras, S. ; Desbois, J. ; Hode, J.M. ; Ventura, P.
Author_Institution :
Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon, France
Abstract :
The development of efficient computation tools based on mixed analytical and numerical calculation approaches allows precise descriptions and characterizations of Surface Acoustic Wave (SAW) propagation. In this work, such a theoretical model is used to analyze the evolution of Pseudo Surface Acoustic Waves (PSAW) on standard YX Lithium Tantalate cuts versus Aluminum strip height. It is shown that the Surface Skimming Bulk Wave (SSBW) which accompanies the PSAW on such crystal orientations may be trapped by the grating, exhibiting a PSAW-like behavior when close to the Bragg condition. The consequences of this phenomenon are discussed
Keywords :
aluminium; boundary integral equations; finite element analysis; lithium compounds; metallisation; periodic structures; surface acoustic wave devices; Al; Al strip height; Bragg condition; LiTaO3; SAW devices; SAW propagation; SSBW to PSAW conversion; crystal orientation; grating; heavy mechanical loading; pseudo surface acoustic waves; standard YX LiTaO3 cuts; surface acoustic wave propagation; surface skimming bulk wave; theoretical model; Acoustic propagation; Acoustic waves; Admittance; Electrodes; Frequency; Gratings; Lithium compounds; Strips; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.922531
