DocumentCode
1745388
Title
Elementary surface acoustic wave effects studied by scanning acoustic force microscopy
Author
Hesjedal, T. ; Behme, G.
Author_Institution
Dept. of Electr. Eng., Stanford Univ., CA, USA
Volume
1
fYear
2000
fDate
36800
Firstpage
223
Abstract
Scanning Acoustic Force Microscopy (SAFM) has been used to study elementary surface acoustic wave phenomena with nanoscale spatial resolution. The SAFM technique is capable of detecting acoustic wave properties of arbitrarily polarized modes with sub-wavelength resolution and unmatched sensitivity. Elementary model systems like symmetric single finger wave sources and circular wave sources are studied for the first time in detail
Keywords
acoustic microscopy; scanning probe microscopy; surface acoustic waves; SAFM; arbitrarily polarized modes; circular wave sources; elementary surface acoustic wave phenomena; nanoscale spatial resolution; scanning acoustic force microscopy; sensitivity; sub-wavelength resolution; symmetric single finger wave sources; Acoustic signal detection; Acoustic waves; Atomic force microscopy; Force measurement; Frequency; Optical surface waves; Probes; Sawing machines; Spatial resolution; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2000 IEEE
Conference_Location
San Juan
ISSN
1051-0117
Print_ISBN
0-7803-6365-5
Type
conf
DOI
10.1109/ULTSYM.2000.922544
Filename
922544
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