Title :
2.4 GHz SAW filters using AlN deposited on off-angle R-plane sapphire substrates by MOCVD
Author :
Shibata, Tomohiko ; Hori, Yuji ; Asai, Keiichiro ; Nakamura, Yukinori ; Tanaka, Mitsuhiro ; Kaigawa, Kazuyuki ; Shibata, Junko ; Sakai, Hiroaki
Author_Institution :
NGK Insulators Ltd., Nagoya, Japan
Abstract :
A-plane AlN films deposited on off-angle R-plane sapphire substrates, in which a surface plane was tilted towards [1-101] sapphire direction, were shown to be effective in restraining the generation of inverted twins. Surface acoustic wave (SAW) filters at 2.4 GHz were reliably made using the optimized AlN on the off-angle sapphire substrate. 2.4 GHz spread spectrum (SS) signals were able to be directly demodulated to baseband data using the optimized front-end SAW matched filter (MF) and delay line (DL) on the AlN
Keywords :
MOCVD coatings; UHF filters; aluminium compounds; matched filters; piezoelectric thin films; surface acoustic wave delay lines; surface acoustic wave filters; 2.4 GHz; A-plane AlN film; Al2O3; AlN; MOCVD; RF front-end; SAW delay line; SAW matched filter; off-angle R-plane sapphire substrate; spread spectrum signal; Baseband; Delay lines; Epitaxial growth; MOCVD; Matched filters; SAW filters; Spread spectrum communication; Substrates; Surface acoustic waves; Temperature;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.922558
