Title :
DLC films for SAW devices and novel self-aligning fabrication process
Author :
Zhgoon, S.A. ; Revkov, A.M. ; Barinov, A.E. ; Zhang, Q. ; Yoon, S.F. ; Ahn, J. ; Rusli
Author_Institution :
Moscow Power Eng. Inst., Russia
Abstract :
A new process for fabrication of SAW devices is described. The process is based on deposition of diamond like carbon (DLC) film, patterning of the DLC film with opening windows for other materials deposition, new photoresist exposure from the backside of the substrate, deposition of several metals and other materials with rough shadow masks and final lift-off. The process uses only one single photomask and no precise alignments. A set of 90 degrees reflecting arrays with Al strips alternating DLC strips together with Au strips alternating DLC strips was prepared on a single substrate and the measurements of this sample are described and discussed
Keywords :
carbon; surface acoustic wave devices; Al; Al strip; Au; Au strip; C; DLC strip; SAW device; diamond like carbon film; lift-off; photomask; photoresist; reflecting array; self-aligning fabrication; shadow mask; Adhesives; Costs; Diamond-like carbon; Fabrication; Gold; Inorganic materials; Organic materials; Piezoelectric films; Substrates; Surface acoustic wave devices;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Conference_Location :
San Juan
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.922568
