Simultaneous phase velocity measurement of non-collinear SAWs by scanning acoustic force microscopy

Author

Behme, G. ; Hesjedal, T.

Author_Institution

Paul Drude Inst. for Solid State Electron., Berlin, Germany

Volume

1

fYear

2000

fDate

36800

Firstpage

611

Abstract

We used multimode Scanning Acoustic Force Microscopy (SAFM) for the simultaneous phase velocity measurement of differently polarized SAWs with non-collinear propagation directions at a submicron lateral scale. By analyzing the torsion of the cantilever in addition to its bending (standard SAFM), normal and in-plane oscillation components due to acoustic waves can be measured. Investigating the mixing of complementary oscillation components of crossed Rayleigh and Love waves on the layered system SiO₂/ST-cut quartz, both phase velocities were obtained simultaneously at the same sample spot

Keywords

Love waves; Rayleigh waves; acoustic microscopy; acoustic wave velocity measurement; atomic force microscopy; surface acoustic waves; Love wave; Rayleigh wave; SiO₂-SiO₂; SiO₂/ST-cut quartz layered system; bending; cantilever; noncollinear SAW propagation; scanning acoustic force microscopy; simultaneous phase velocity measurement; torsion; Acoustic measurements; Acoustic waves; Atomic force microscopy; Force measurement; Frequency; Optical surface waves; Phase measurement; Sawing machines; Surface acoustic waves; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2000 IEEE

Conference_Location

San Juan

ISSN

1051-0117

Print_ISBN

0-7803-6365-5

Type

conf

DOI

10.1109/ULTSYM.2000.922623

Filename

922623