Simultaneous phase velocity measurement of non-collinear SAWs by scanning acoustic force microscopy

We used multimode Scanning Acoustic Force Microscopy (SAFM) for the simultaneous phase velocity measurement of differently polarized SAWs with non-collinear propagation directions at a submicron lateral scale. By analyzing the torsion of the cantilever in addition to its bending (standard SAFM), normal and in-plane oscillation components due to acoustic waves can be measured. Investigating the mixing of complementary oscillation components of crossed Rayleigh and Love waves on the layered system SiO₂/ST-cut quartz, both phase velocities were obtained simultaneously at the same sample spot