Micromachined angular rate sensor allowing interchangeable operation in both amplitude modulation and frequency modulation

Author

Yanling Hao ; Bo Liu ; Chunyang Yu ; Guangtao Zhou

Author_Institution

Coll. of Autom., Harbin Eng. Univ., Harbin, China

fYear

2014

fDate

5-8 May 2014

Firstpage

147

Lastpage

151

Abstract

The paper reports a novel design of MEMS vibratory gyroscope. The gyroscope consists of multi-mass. The proposed angular sensor can be operated in both amplitude modulation (AM) and frequency modulation (FM). The proposed gyroscope can work as a 2-degree of freedom (DOF) gyroscope or a 3-DOF gyroscope. When the sensor works as a 2-DOF gyroscope, the simulation shows that the sensitivity is high and the bandwidth is narrow. When the sensor works as a 3-DOF gyroscope, the simulation shows that the sensitivity is low and the bandwidth is improved to 900Hz in drive-mode.

Keywords

amplitude modulation; angular measurement; frequency modulation; gyroscopes; micromachining; microsensors; vibration measurement; 2-DOF gyroscope; 2-degree of freedom gyroscope; 3-DOF gyroscope; AM; FM; MEMS vibratory gyroscope; amplitude modulation; bandwidth 900 MHz; frequency modulation; micromachined angular rate sensor; Bandwidth; Force; Frequency modulation; Gyroscopes; Mathematical model; Resonant frequency; Sensitivity; MEMS gyroscope; amplitude modulation; angle measuring; frequency modulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Position, Location and Navigation Symposium - PLANS 2014, 2014 IEEE/ION

Conference_Location

Monterey, CA

Print_ISBN

978-1-4799-3319-8

Type

conf

DOI

10.1109/PLANS.2014.6851368

Filename

6851368