Title :
MEMS electrostatic actuators for optical switching applications
Author :
Grade, J.D. ; Jerman, H.
Author_Institution :
Iolon Inc, San Jose, CA, USA
Abstract :
Electrostatic actuators providing linear and angular deflection have been developed using deep reactive ion etching (DRIE). Optical switches with 0.5 dB loss at 1550 nm have been made showing switching times less than 5 ms.
Keywords :
electrostatic actuators; micro-optics; optical communication equipment; optical switches; sputter etching; 0.5 dB; 1550 nm; 5 ms; MEMS electrostatic actuators; angular deflection; deep reactive ion etching; linear deflection; optical switches; optical switching applications; switching times; Electrostatic actuators; Etching; Hydraulic actuators; Micromechanical devices; Optical attenuators; Optical beams; Optical collimators; Optical fibers; Optical filters; Optical switches;
Conference_Titel :
Optical Fiber Communication Conference and Exhibit, 2001. OFC 2001
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-55752-655-9
