Flexible inserter for IC testing based on force control

Author

Kawaji, Shigeyasu ; Ozaki, Fuminori ; Higashi, Ryutaro ; Taguchi, Tomohiro ; Yamakawa, Noboru ; Shimamura, Jumpei ; Arao, Masaki

Author_Institution

Kumamoto Univ., Japan

fYear

2001

fDate

2001

Firstpage

476

Lastpage

481

Abstract

In assembly lines in industrial fields, the construction of advanced manufacturing system which could autonomously adapt to various process variations is desired. For this, it is necessary to accomplish a breakthrough in bringing “force control” techniques into use for the practical applications. In this paper, a case of solving the problem is reported which conventional position control is used to hold the inserter for IC testing in the semiconductor manufacturing process, by developing the high-speed sensorless force control technology

Keywords

automatic test equipment; force control; integrated circuit testing; process control; IC testing; advanced manufacturing system; assembly lines; flexible inserter; force control; high-speed sensorless force control technology; semiconductor manufacturing process; Assembly systems; Construction industry; Electrical equipment industry; Force control; High speed integrated circuits; Integrated circuit testing; Manufacturing industries; Manufacturing systems; Position control; Sensorless control;

fLanguage

English

Publisher

ieee

Conference_Titel

Assembly and Task Planning, 2001, Proceedings of the IEEE International Symposium on

Conference_Location

Fukuoka

Print_ISBN

0-7803-7004-X

Type

conf

DOI

10.1109/ISATP.2001.929080

Filename

929080