Title :
An investigation of thick-film resistor, fired at different temperatures, for strain sensors
Author :
Hrovat, Mako ; Belavic, Darko ; Samardzija, Zoran ; Holc, Janez
Author_Institution :
Jozef Stefan Inst., Ljubljana, Slovenia
Abstract :
Some commercial 10 kΩ/sq. thick-film resistors based on RuO 2, ruthenates or a mixture of RuO2 and ruthenates, were evaluated for strain gauge applications. The resistors were fired at different temperatures to determine the influence of firing temperature on the electrical characteristics. The conductive phase in the resistors was determined with X-ray powder-diffraction (XRD) analysis. Microstructures of the thick-film resistors were analysed via SEM and EDS. The temperature coefficients of resistivity, noise indices and gauge factors (GFs) were measured. The results indicate that both the GFs and the noise indices are different for resistors with the same nominal sheet resistivity but which came from different resistor series
Keywords :
X-ray chemical analysis; X-ray diffraction; electric sensing devices; electron device noise; ruthenium compounds; scanning electron microscopy; strain sensors; thick film resistors; Bi2Ru2O7; EDS; Pb2Ru2O6.5; RuO2; RuO2-based resistors; RuO2/ruthenates mixture-based resistors; SEM; X-ray powder-diffraction analysis; conductive phase; electrical characteristics; firing temperature; firing temperatures; gauge factors; noise indices; resistor firing temperatures; resistor series; ruthenates-based resistors; sheet resistivity; strain gauge applications; strain sensors; temperature coefficient of resistivity; thick-film resistor; thick-film resistor microstructures; Bismuth; Capacitive sensors; Conductivity; Glass; Microstructure; Noise measurement; Resistors; Semiconductor device noise; Temperature sensors; Thick film sensors;
Conference_Titel :
Electronics Technology: Concurrent Engineering in Electronic Packaging, 2001. 24th International Spring Seminar on
Conference_Location :
Calimanesti-Caciulata
Print_ISBN :
0-7803-7111-9
DOI :
10.1109/ISSE.2001.931004
