An investigation of thick-film resistor, fired at different temperatures, for strain sensors

Author

Hrovat, Mako ; Belavic, Darko ; Samardzija, Zoran ; Holc, Janez

Author_Institution

Jozef Stefan Inst., Ljubljana, Slovenia

fYear

2001

fDate

2001

Firstpage

32

Lastpage

36

Abstract

Some commercial 10 kΩ/sq. thick-film resistors based on RuO ₂, ruthenates or a mixture of RuO₂ and ruthenates, were evaluated for strain gauge applications. The resistors were fired at different temperatures to determine the influence of firing temperature on the electrical characteristics. The conductive phase in the resistors was determined with X-ray powder-diffraction (XRD) analysis. Microstructures of the thick-film resistors were analysed via SEM and EDS. The temperature coefficients of resistivity, noise indices and gauge factors (GFs) were measured. The results indicate that both the GFs and the noise indices are different for resistors with the same nominal sheet resistivity but which came from different resistor series

Keywords

X-ray chemical analysis; X-ray diffraction; electric sensing devices; electron device noise; ruthenium compounds; scanning electron microscopy; strain sensors; thick film resistors; Bi₂Ru₂O₇; EDS; Pb₂Ru₂O_6.5; RuO₂; RuO₂-based resistors; RuO₂/ruthenates mixture-based resistors; SEM; X-ray powder-diffraction analysis; conductive phase; electrical characteristics; firing temperature; firing temperatures; gauge factors; noise indices; resistor firing temperatures; resistor series; ruthenates-based resistors; sheet resistivity; strain gauge applications; strain sensors; temperature coefficient of resistivity; thick-film resistor; thick-film resistor microstructures; Bismuth; Capacitive sensors; Conductivity; Glass; Microstructure; Noise measurement; Resistors; Semiconductor device noise; Temperature sensors; Thick film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology: Concurrent Engineering in Electronic Packaging, 2001. 24th International Spring Seminar on

Conference_Location

Calimanesti-Caciulata

Print_ISBN

0-7803-7111-9

Type

conf

DOI

10.1109/ISSE.2001.931004

Filename

931004