DocumentCode :
1747470
Title :
Priority-based tool capacity allocation in the foundry fab
Author :
Yu, Chih-Yuan ; Huang, Han-Pang
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Volume :
2
fYear :
2001
fDate :
2001
Firstpage :
1839
Abstract :
A virtual unit, tool group, is used to represent the group of tools in semiconductor foundry. Hence, a tool may belong to several tool groups because it may be handle several kinds of recipes. The coupling relation between the tools and the tool groups is a complex many-to-many relation. The paper aims to decide the tool-dispatching rule in tool capacity allocation. The term, "priority-based", is two-fold. One is to prioritize the lots in the fab, the other is to prioritize the tools in the correlated tool groups. The priority-based algorithm is used to estimate the tool utilization, bottleneck, tool-sharing in the tool groups, throughput of the tool groups and WIP (work in process) in a specific day. The proposed algorithm is applied to a real foundry fab and the results show that maximum fuzzy candidative ratio is better than other rules. Besides, a demonstration shows that the supervisor can find the bottleneck tools by the proposed algorithm and release the bottleneck by adding the right tools.
Keywords :
fuzzy logic; integrated circuit manufacture; learning systems; production control; resource allocation; bottleneck; foundry fab; maximum fuzzy candidative ratio; priority-based tool capacity allocation; semiconductor foundry; tool group; tool utilization; tool-dispatching rule; tool-sharing; virtual unit; work in process; Capacity planning; Dispatching; Foundries; Laboratories; Mechanical engineering; Neural networks; Production control; Robots; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Robotics and Automation, 2001. Proceedings 2001 ICRA. IEEE International Conference on
ISSN :
1050-4729
Print_ISBN :
0-7803-6576-3
Type :
conf
DOI :
10.1109/ROBOT.2001.932876
Filename :
932876
Link To Document :
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