DocumentCode
1748109
Title
Is micromachining still a dream or an industrial reality?
Author
Murari, Bruno
Author_Institution
STMicroelectron., Cornaredo, Italy
Volume
1
fYear
2001
fDate
2001
Firstpage
5
Abstract
This paper discusses the emerging MEMS technologies that address the problems of industrial scale application, examining aspects such as developing processes suitable for multiple applications, new methods of packaging and issues concerning reliability
Keywords
electrostatic actuators; electrostatic motors; mechatronics; micromachining; packaging; reliability; emerging MEMS technologies; industrial scale application; micromachining; packaging; reliability; Accelerometers; CMOS technology; Circuits; Etching; Microelectromechanical devices; Micromachining; Micromechanical devices; Packaging; Plastics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics, 2001. Proceedings. 2001 IEEE/ASME International Conference on
Conference_Location
Como
Print_ISBN
0-7803-6736-7
Type
conf
DOI
10.1109/AIM.2001.936421
Filename
936421
Link To Document