• DocumentCode
    174901
  • Title

    Ratio-metric readout technique for MEMS gyroscopes with force feedback

  • Author

    Eminoglu, Burak ; Kline, Mitchell H. ; Izyumin, Igor ; Yu-Ching Yeh ; Boser, Bernhard E.

  • Author_Institution
    Berkeley Sensor & Actuator Center (BSAC), Univ. of California, Berkeley, Berkeley, CA, USA
  • fYear
    2014
  • fDate
    5-8 May 2014
  • Firstpage
    1203
  • Lastpage
    1208
  • Abstract
    This paper presents a ratio-metric readout technique for force-feedback gyroscopes that achieves a precise scale factor. The drive mode self-oscillation loop is modified to continuously estimate the scale factor to track and reject changes of the drive mode velocity and proof mass voltage. Experiments demonstrate a twenty-fold reduction of scale factor variations and the suppression of the turn-on transient. The device achieves an angle random walk of 5.3 mdeg/rt-s and a bias stability of 3 deg/hr.
  • Keywords
    force feedback; gyroscopes; microsensors; readout electronics; MEMS gyroscopes; drive mode self-oscillation loop; drive mode velocity; force-feedback gyroscopes; precise scale factor; proof mass voltage; ratio-metric readout technique; turn-on transient suppression; Accuracy; Electrodes; Force feedback; Frequency measurement; Frequency modulation; Gyroscopes; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Position, Location and Navigation Symposium - PLANS 2014, 2014 IEEE/ION
  • Conference_Location
    Monterey, CA
  • Print_ISBN
    978-1-4799-3319-8
  • Type

    conf

  • DOI
    10.1109/PLANS.2014.6851493
  • Filename
    6851493
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=174901