Title :
Ratio-metric readout technique for MEMS gyroscopes with force feedback
Author :
Eminoglu, Burak ; Kline, Mitchell H. ; Izyumin, Igor ; Yu-Ching Yeh ; Boser, Bernhard E.
Author_Institution :
Berkeley Sensor & Actuator Center (BSAC), Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
This paper presents a ratio-metric readout technique for force-feedback gyroscopes that achieves a precise scale factor. The drive mode self-oscillation loop is modified to continuously estimate the scale factor to track and reject changes of the drive mode velocity and proof mass voltage. Experiments demonstrate a twenty-fold reduction of scale factor variations and the suppression of the turn-on transient. The device achieves an angle random walk of 5.3 mdeg/rt-s and a bias stability of 3 deg/hr.
Keywords :
force feedback; gyroscopes; microsensors; readout electronics; MEMS gyroscopes; drive mode self-oscillation loop; drive mode velocity; force-feedback gyroscopes; precise scale factor; proof mass voltage; ratio-metric readout technique; turn-on transient suppression; Accuracy; Electrodes; Force feedback; Frequency measurement; Frequency modulation; Gyroscopes; Resonant frequency;
Conference_Titel :
Position, Location and Navigation Symposium - PLANS 2014, 2014 IEEE/ION
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4799-3319-8
DOI :
10.1109/PLANS.2014.6851493
