Title :
Planar emitter deposited on anodic alumina substrate: the fabrication technique and emitting properties
Author :
Mukhurov, N.I. ; Galdetskiy, A.V. ; Gasenkova, I.V. ; Kotova, I.F.
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Belarus
Abstract :
Planar gridless field effect array is fabricated and tested. The currents in the range 4-7 μA are obtained at 60% of the tips
Keywords :
alumina; anodised layers; electron field emission; vacuum microelectronics; 4 to 7 muA; Al2O3; anodic alumina substrate; emitting properties; fabrication technique; planar gridless field emitter array; Aluminum oxide; Anodes; Diodes; Electrodes; Electronic equipment testing; Fabrication; Field emitter arrays; Microwave devices; Substrates; Vacuum technology;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939744
