Title :
Analysis of the field electron energy distribution from amorphous carbon-nitride film
Author :
Chen, Jun ; Huang, N.Y. ; Liu, X.W. ; Deng, S.Z. ; Xu, N.S.
Author_Institution :
State Key Lab for Ultrafast Laser Spectrosc. Study, Zhongshan Univ., Guangzhou, China
Abstract :
The field electron energy distribution (FEED) from an amorphous carbon-nitride film has been analyzed to understand its field emission mechanism. The FEED data obtained at different fields are fitted by using a theoretical energy distribution of the free electron approximation and taking into account the broadening induced by the electron spectrometer
Keywords :
amorphous state; carbon compounds; curve fitting; electron field emission; electron spectroscopy; free-electron approximation; CN; FEED; FEED data fitting; a-CN film; amorphous carbon-nitride film; electron spectrometer induced broadening; energy distribution; field electron energy distribution; field emission mechanism; free electron approximation; Amorphous materials; Conductive films; Electron emission; Feeds; Flat panel displays; Magnetic analysis; Magnetic films; Spectroscopy; Thermal conductivity; Tunneling;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939751
