DocumentCode :
1750010
Title :
Scanning nonlinear dielectric microscopy with nanometer resolution
Author :
Cho, Yasuo ; Kazuta, Satoshi ; Matsuura, Kaori ; Odagawa, Hiroyuki
Author_Institution :
Res. Inst. of Electron. Commun., Tohoku Univ., Sendai, Japan
Volume :
1
fYear :
2000
fDate :
2000
Firstpage :
279
Abstract :
A very high-resolution scanning nonlinear dielectric microscope with nanometer resolution was developed for the observation of ferroelectric polarization. We demonstrate that the resolution of the microscope is of a nanometer order by measurement of the c-c domain wall of a BaTiO3 single crystal and of the domains in PZT and SBT thin films. Especially in a film measurement, the resolution was sub-nanometer order. Next, we also demonstrate that the resolution of SNDM is higher than that of a conventional piezo-response imaging. Finally, to check the performance of the SNDM system as a ferroelectric recording system, we conducted a fundamental study on the writing of domain inversion dot in PZT thin film and succeeded to have a very small domain dots with the size of 25 nm
Keywords :
dielectric measurement; dielectric polarisation; electric domain walls; ferroelectric thin films; scanning probe microscopy; (SrBa)TiO3; 25 nm; BaTiO3; BaTiO3 single crystal; PZT; PZT thin film; PbZrO3TiO3; SBT thin film; domain inversion dot; domain wall; ferroelectric polarization; ferroelectric recording; nanometer resolution; scanning nonlinear dielectric microscopy; Capacitance; Dielectric constant; Dielectric measurements; Dielectric thin films; Ferroelectric materials; High-resolution imaging; Image resolution; Microscopy; Piezoelectric polarization; Probes;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
ISSN :
1099-4734
Print_ISBN :
0-7803-5940-2
Type :
conf
DOI :
10.1109/ISAF.2000.941555
Filename :
941555
Link To Document :
بازگشت