Title :
Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods
Author :
Mikalsen, E.A. ; Payne, D.A.
Author_Institution :
Dept. of Mater. Sci. & Eng., Illinois Univ., Urbana, IL, USA
Abstract :
Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (μ-CP), and (ii) micromolding in capillaries (MIMIC). These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces
Keywords :
ferroelectric ceramics; ferroelectric devices; ferroelectric thin films; lead compounds; liquid phase deposition; lithography; micromechanical devices; moulding; PZT; PbZrO3TiO3; additive deposition; additive soft-lithographic methods; chemical-solution methods; ferroelectric materials; ferroelectric thin layers; mediated chemical solution deposition; microcontact printing; micromolding in capillaries; nonplanar surfaces; patterning techniques; Additives; Ceramics; Chemicals; Etching; Ferroelectric materials; Optical films; Residual stresses; Silicon; Substrates; Tensile stress;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.941585
