Additive deposition and patterning of ferroelectric materials on non-planar surfaces by chemical-solution methods

Author

Mikalsen, E.A. ; Payne, D.A.

Author_Institution

Dept. of Mater. Sci. & Eng., Illinois Univ., Urbana, IL, USA

Volume

1

fYear

2000

fDate

2000

Firstpage

417

Abstract

Recent developments and understanding for the deposition and patterning of ferroelectric thin layers are reported. Two patterning techniques are described for mediated chemical solution deposition by: (i) microcontact printing (μ-CP), and (ii) micromolding in capillaries (MIMIC). These additive soft-lithographic methods are demonstrated for the patterning of sol-gel derived lead zirconate titanate (PZT) films on non-planar surfaces

Keywords

ferroelectric ceramics; ferroelectric devices; ferroelectric thin films; lead compounds; liquid phase deposition; lithography; micromechanical devices; moulding; PZT; PbZrO3TiO3; additive deposition; additive soft-lithographic methods; chemical-solution methods; ferroelectric materials; ferroelectric thin layers; mediated chemical solution deposition; microcontact printing; micromolding in capillaries; nonplanar surfaces; patterning techniques; Additives; Ceramics; Chemicals; Etching; Ferroelectric materials; Optical films; Residual stresses; Silicon; Substrates; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on

Conference_Location

Honolulu, HI

ISSN

1099-4734

Print_ISBN

0-7803-5940-2

Type

conf

DOI

10.1109/ISAF.2000.941585

Filename

941585