Title :
Dynamic properties of PZT thick films structured on Si membrane by the aerosol deposition method
Author :
Lebedev, M. ; Akedo, J. ; Akiyama, Y.
Author_Institution :
Mech. Eng. Lab., AIST, Ibaraki, Japan
Abstract :
The results of the direct deposition of lead zirconate titanate [Pb(Zr0.52Ti0.48)O3] (PZT) thick film on a Si based structure are presented. The dynamic actuation properties of PZT on the Si membrane were investigated. For a 7.5 × 7.5 mm 2, 170-μm-thick Si membrane driven by a 4.7 × 4.3 mm 2, 40-μm-thick PZT layer, the deflection and pumping force, which were 1.6 μm and 6.5 kPa, respectively, upon applying 100 V at nonresonance frequency 100 Hz were measured
Keywords :
aerosols; lead compounds; membranes; microactuators; micropumps; piezoceramics; piezoelectric actuators; thick films; 100 Hz; 100 V; MEMS technology; PZT; PZT thick film; PbZrO3TiO3; Si; Si membrane; aerosol deposition method; deflection; dynamic actuation; piezoceramic; pumping force; Aerodynamics; Aerosols; Biomembranes; Force measurement; Piezoelectric films; Plasma temperature; Semiconductor films; Sputter etching; Substrates; Thick films;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.941595
