Design, fabrication and dynamic analysis of a PZT-actuated silicon suspension

Author

Chen, Tsung-Lin ; Horowitz, Roberto

Author_Institution

Dept. of Mech. Eng., California Univ., Berkeley, CA, USA

Volume

2

fYear

2001

fDate

2001

Firstpage

1235

Abstract

A silicon suspension, suitable for use in a piezoelectrically actuated dual-stage servo system for magnetic Hard Disk Drives (HDDs), has been designed, fabricated and partially tested on the rotating disk. The suspension has an integrated gimbal structure and features that are useful for attaching PZT (Pb(Zr_xTi_1-x)0₃) strips. Under a 30 V applied voltage, the PZT strips stretch the suspension, producing an effective 1.3 μm magnetic head radial motion. The suspension has an in-situ piezoresistive film, which produces a signal proportional to the in-plane suspension bending. This signal can be used as an additional relative position error signal, which greatly improves the robustness of the track-following HDD servo. Microfabrication techniques, suitable for fabricating this high performance one-pieced silicon suspension, are also presented

Keywords

disc drives; micromechanical devices; servomechanisms; HDD servo; MEMS; PZT-actuated silicon suspension; hard disk drives; integrated gimbal structure; robustness; servo system; silicon suspension; track-following; Fabrication; Hard disks; Joining processes; Magnetic analysis; Magnetic levitation; Servomechanisms; Silicon; Strips; System testing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 2001. Proceedings of the 2001

Conference_Location

Arlington, VA

ISSN

0743-1619

Print_ISBN

0-7803-6495-3

Type

conf

DOI

10.1109/ACC.2001.945891

Filename

945891