Title :
Compact modeling of n-side interstrip resistance in p-stop and p-spray isolated double-sided silicon microstrip detectors
Author :
Verzellesi, G. ; Betta, G. F Dalla ; Pignatel, G.U.
Author_Institution :
INFM, Modena, Italy
Abstract :
A compact, analytical model is derived for the n-side interstrip resistance of double-sided silicon microstrip detectors, allowing for fast and accurate prediction of the minimum p-stop (or p-spray) implant dose ensuring adequate interstrip isolation. The basic idea on which the proposed model relies is that the portion of the detector between two adjacent n-strips can effectively be assimilated to an equivalent n-channel MOSFET. The interstrip resistance can be evaluated as the output resistance of such an equivalent MOSFET using standard SPICE-like models. The influence of radiation-induced oxide charge and p-stop (or p-spray) voltage can be incorporated into the model by simply including in the threshold voltage expression the induced flat-band voltage shift and body-effect term, respectively
Keywords :
electric resistance; semiconductor device models; silicon radiation detectors; MOSFET; SPICE; Si; double-sided Si microstrip detectors; n-side interstrip resistance; p-spray; p-spray implant dose; p-spray voltage; p-stop; p-stop implant dose; p-stop voltage; radiation-induced oxide charge; threshold voltage; Analytical models; Detectors; Electrons; Implants; MOSFET circuits; Microstrip; Passivation; Silicon; Surface resistance; Threshold voltage;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2000 IEEE
Conference_Location :
Lyon
Print_ISBN :
0-7803-6503-8
DOI :
10.1109/NSSMIC.2000.949004