Title :
Bottleneck elimination for efficiency improvement in equipment engineering data use activities
Author :
Shimbo, Masahiro ; Ikeda, Masatoshi ; Minamide, Masahiko ; Matsumura, Hiroshi ; Uchida, Junichi ; Nishimura, Hidetaka
Author_Institution :
Semicond. Leading Edge Technol., Inc., Tokyo, Japan
Abstract :
This paper discusses the bottleneck step elimination for efficiency improvement in equipment engineering data utilization activities based on the analysis of the common data utilization procedure.
Keywords :
data analysis; equipment evaluation; production engineering computing; production equipment; production management; semiconductor industry; bottleneck elimination; bottleneck step elimination; common data utilization procedure; efficiency improvement; equipment engineering data use activity; equipment engineering data utilization activity; Variable speed drives;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4577-0392-8
Electronic_ISBN :
1523-553X
