• DocumentCode
    1753932
  • Title

    Mathematical model for estimating direct tool to tool transport ratio

  • Author

    Kondo, Hiroshi

  • Author_Institution
    Muratec Autom. Co., Ltd., Ise, Japan
  • fYear
    2010
  • fDate
    18-20 Oct. 2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In designing a rail layout for Overhead Hoist Transport system (OHT) and determining appropriate number of Overhead Hoist Vehicles (OHVs), detail transport request volume data, so-called a from-to matrix, is very important. But it strongly depends on estimates of direct tool to tool delivery ratio (henceforth, it is abbreviated as `direct ratio´). So how to estimate direct ratios is critical in designing an OHT system for a particular fab. This paper proposes a reasonable method to estimate direct ratios.
  • Keywords
    hoists; materials handling equipment; rails; semiconductor device manufacture; direct tool to tool transport ratio estimation; from-to matrix; mathematical model; overhead hoist transport system; overhead hoist vehicle; rail layout design; wafer processing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM), 2010 International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4577-0392-8
  • Electronic_ISBN
    1523-553X
  • Type

    conf

  • Filename
    5750198