DocumentCode :
1753932
Title :
Mathematical model for estimating direct tool to tool transport ratio
Author :
Kondo, Hiroshi
Author_Institution :
Muratec Autom. Co., Ltd., Ise, Japan
fYear :
2010
fDate :
18-20 Oct. 2010
Firstpage :
1
Lastpage :
4
Abstract :
In designing a rail layout for Overhead Hoist Transport system (OHT) and determining appropriate number of Overhead Hoist Vehicles (OHVs), detail transport request volume data, so-called a from-to matrix, is very important. But it strongly depends on estimates of direct tool to tool delivery ratio (henceforth, it is abbreviated as `direct ratio´). So how to estimate direct ratios is critical in designing an OHT system for a particular fab. This paper proposes a reasonable method to estimate direct ratios.
Keywords :
hoists; materials handling equipment; rails; semiconductor device manufacture; direct tool to tool transport ratio estimation; from-to matrix; mathematical model; overhead hoist transport system; overhead hoist vehicle; rail layout design; wafer processing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location :
Tokyo
ISSN :
1523-553X
Print_ISBN :
978-1-4577-0392-8
Electronic_ISBN :
1523-553X
Type :
conf
Filename :
5750198
Link To Document :
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